Rotary Si Target
Product introduction
With plasma as the heat source, high purity and high density Si targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
Applications
For deposition ofSiO2/Si3N4 films, for optical glasses, AR films of touch panel screens, Low-E glasses, semiconductor devices and flat panel screens.
